ADE-FDTD Rare-earth Oxide interface AFM Hafnium silicate Silicon nanocrystals Grazing incidence X-ray diffraction FTIR Couches minces Sputtering Pulvérisation magnétron radiofréquence Nanostructured materials Nanostructuring Luminescence Structural properties Thin film Si-rich silicon oxide Silicon nitride Rare-earth- doped materials Hillocks Microstructure physique Silicon nanoclusters Pulvérisation cathodique Couches minces semi-conductrices Resistive Switching XRD Friction Crystal structure Phase transition Matériaux hybrides Films Epitaxy Electron paramagnetic resonance Laser pyrolysis Citric acid Conductivity CO adsorption Semiconductors SiC Raman scattering Quantum-well Atom probe tomography Refractive index Si nanocluster Oxide materials Feature erasure Reactive magnetron sputtering Optical amplifiers Raman CoMoS Waveguide Rare earth Magnetron sputtering Computational electromagnetic methods Al2O3 Infrared absorption Guide d'onde Nanostructure Lifetime Oxides Microstructure Nanostructures Down-conversion Rare-earth-doped materials RF magnetron sputtering Cathodoluminescence Photovoltaic Liposomes Terres rares Waveguides Silicon photonics Terbium Photoluminescence Erbium Hafnium silicates Microstructure physics High-k dielectrics Neodymium Irradiation Silicon Rare-earth ions Electroluminescence Doping M-lines Fluorescence Silicium PZT Nanoparticules Cerium HR STEM-HAADF MoS2 IR spectroscopy Oxygen vacancies Rare earths Nanoparticles GENOMIQUE Multilayers Radiofrequency magnetron sputtering Thin films Energy transfer