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A generic deep-learning based defect segmentation model for electron micrographs for automatic defect inspection

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Dates and versions

hal-03904731 , version 1 (17-12-2022)

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  • HAL Id : hal-03904731 , version 1

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Julien Baderot, Ali Hallal, Martin Jacob, Vincent Barra, Arnaud Guillin, et al.. A generic deep-learning based defect segmentation model for electron micrographs for automatic defect inspection. SPIE Advanced Lithography, Feb 2023, San José, California, United States. ⟨hal-03904731⟩
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