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A generic deep-learning based defect segmentation model for electron micrographs for automatic defect inspection

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Computer Science [cs] Artificial Intelligence [cs.AI]

Vincent BARRA  : Connect in order to contact the contributor

https://hal.uca.fr/hal-03904731

Submitted on : Saturday, December 17, 2022-10:22:08 AM

Last modification on : Sunday, December 18, 2022-8:16:57 AM

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hal-03904731 , version 1 (17-12-2022)

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  • HAL Id : hal-03904731 , version 1

Cite

Julien Baderot, Ali Hallal, Martin Jacob, Vincent Barra, Arnaud Guillin, et al.. A generic deep-learning based defect segmentation model for electron micrographs for automatic defect inspection. SPIE Advanced Lithography, Feb 2023, San José, California, United States. ⟨hal-03904731⟩

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PRES_CLERMONT CNRS UMR6620 LIMOS CLERMONT-AUVERGNE-INP
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